8/17/2010	10:36:29 AM	Bypass valve closed
8/17/2010	10:36:29 AM	Main Vac valve closed
8/17/2010	10:36:35 AM	Main Vac valve opened
8/17/2010	10:36:36 AM	Bypass valve opened
8/17/2010	10:36:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/17/2010	10:36:39 AM	Recipe started at 10:36 AM
8/17/2010	10:36:39 AM	H2 valve closed
8/17/2010	10:36:39 AM	BCl3 valve closed
8/17/2010	10:36:39 AM	PH3 valve closed
8/17/2010	10:36:39 AM	SiCl4 pre valve closed
8/17/2010	10:36:39 AM	SiCl4 post valve closed
8/17/2010	10:36:39 AM	Main Vac valve closed
8/17/2010	10:36:39 AM	Bypass valve closed
8/17/2010	10:36:39 AM	Bubbler valve closed
8/17/2010	10:36:39 AM	Helium valve opened
8/17/2010	10:36:39 AM	Helium MFC set to  500.000000
8/17/2010	10:36:39 AM	H2 MFC set to  0.000000
8/17/2010	10:36:39 AM	BCl3 MFC set to  0.000000
8/17/2010	10:36:39 AM	PHl3 MFC set to  0.000000
8/17/2010	10:36:39 AM	SiCl4 MFC set to  0.000000
8/17/2010	10:36:39 AM	Bypass solenoid MFC set to  0.000000
8/17/2010	10:36:40 AM	Tube furnace set to 0
8/17/2010	10:38:00 AM	Helium valve closed
8/17/2010	10:38:00 AM	H2 valve closed
8/17/2010	10:38:00 AM	BCl3 valve closed
8/17/2010	10:38:00 AM	PH3 valve closed
8/17/2010	10:38:00 AM	SiCl4 pre valve closed
8/17/2010	10:38:00 AM	SiCl4 post valve closed
8/17/2010	10:38:00 AM	Main Vac valve closed
8/17/2010	10:38:00 AM	Bypass valve closed
8/17/2010	10:38:00 AM	Bubbler valve closed
8/17/2010	10:38:00 AM	Helium MFC set to  0.000000
8/17/2010	10:38:00 AM	H2 MFC set to  0.000000
8/17/2010	10:38:00 AM	BCl3 MFC set to  0.000000
8/17/2010	10:38:00 AM	PHl3 MFC set to  0.000000
8/17/2010	10:38:00 AM	SiCl4 MFC set to  0.000000
8/17/2010	10:38:00 AM	Bypass solenoid MFC set to  0.000000
8/17/2010	10:38:00 AM	Tube furnace set to 0
8/17/2010	10:38:00 AM	Run finished at 10:38 AM
8/17/2010	10:38:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/17/2010	10:46:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/17/2010	10:46:08 AM	Recipe started at 10:46 AM
8/17/2010	10:46:08 AM	Helium valve closed
8/17/2010	10:46:08 AM	H2 valve closed
8/17/2010	10:46:08 AM	BCl3 valve closed
8/17/2010	10:46:08 AM	PH3 valve closed
8/17/2010	10:46:08 AM	SiCl4 pre valve closed
8/17/2010	10:46:08 AM	SiCl4 post valve closed
8/17/2010	10:46:08 AM	Main Vac valve closed
8/17/2010	10:46:08 AM	Bubbler valve closed
8/17/2010	10:46:08 AM	Bypass valve opened
8/17/2010	10:46:08 AM	Helium MFC set to  0.000000
8/17/2010	10:46:08 AM	H2 MFC set to  0.000000
8/17/2010	10:46:08 AM	BCl3 MFC set to  0.000000
8/17/2010	10:46:08 AM	PHl3 MFC set to  0.000000
8/17/2010	10:46:08 AM	SiCl4 MFC set to  0.000000
8/17/2010	10:46:08 AM	Bypass solenoid MFC set to  0.000000
8/17/2010	10:46:08 AM	Tube furnace set to 0
8/17/2010	10:46:50 AM	Helium valve closed
8/17/2010	10:46:50 AM	H2 valve closed
8/17/2010	10:46:50 AM	BCl3 valve closed
8/17/2010	10:46:50 AM	PH3 valve closed
8/17/2010	10:46:50 AM	SiCl4 pre valve closed
8/17/2010	10:46:50 AM	SiCl4 post valve closed
8/17/2010	10:46:50 AM	Bubbler valve closed
8/17/2010	10:46:50 AM	Main Vac valve opened
8/17/2010	10:46:50 AM	Bypass valve opened
8/17/2010	10:46:50 AM	Helium MFC set to  0.000000
8/17/2010	10:46:50 AM	H2 MFC set to  0.000000
8/17/2010	10:46:50 AM	BCl3 MFC set to  0.000000
8/17/2010	10:46:50 AM	PHl3 MFC set to  0.000000
8/17/2010	10:46:50 AM	SiCl4 MFC set to  0.000000
8/17/2010	10:46:50 AM	Bypass solenoid MFC set to  0.000000
8/17/2010	10:46:50 AM	Tube furnace set to 0
8/17/2010	10:46:50 AM	Run finished at 10:46 AM
8/17/2010	10:46:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/17/2010	11:16:03 AM	Helium valve opened
8/17/2010	11:16:08 AM	Helium MFC set to  100.000000
8/17/2010	11:36:04 AM	Helium valve closed
8/17/2010	12:03:12 PM	Helium valve opened
8/17/2010	12:10:31 PM	Helium valve closed
8/17/2010	12:10:33 PM	Helium MFC set to  0.000000
8/17/2010	1:30:34 PM	Helium valve opened
8/17/2010	1:30:36 PM	Helium MFC set to  100.000000
8/17/2010	1:47:39 PM	Helium valve closed
8/17/2010	1:47:40 PM	Helium MFC set to  0.000000
8/17/2010	2:07:01 PM	Bypass valve closed
8/17/2010	2:07:02 PM	Main Vac valve closed
8/17/2010	2:07:05 PM	Main Vac valve opened
8/17/2010	2:07:06 PM	Bypass valve opened
8/17/2010	2:07:07 PM	Helium valve opened
8/17/2010	2:07:14 PM	Helium MFC set to  100.000000
8/17/2010	2:07:16 PM	Helium valve closed
8/17/2010	2:07:18 PM	Helium MFC set to  0.000000
8/17/2010	2:07:21 PM	Tube furnace set to 100
8/17/2010	2:12:15 PM	Recipe started at 2:12 PM
8/17/2010	2:12:15 PM	Helium valve closed
8/17/2010	2:12:15 PM	BCl3 valve closed
8/17/2010	2:12:15 PM	PH3 valve closed
8/17/2010	2:12:15 PM	SiCl4 pre valve closed
8/17/2010	2:12:15 PM	SiCl4 post valve closed
8/17/2010	2:12:15 PM	Main Vac valve closed
8/17/2010	2:12:15 PM	Bypass valve closed
8/17/2010	2:12:15 PM	Bubbler valve closed
8/17/2010	2:12:15 PM	H2 valve opened
8/17/2010	2:12:15 PM	Helium MFC set to  0.000000
8/17/2010	2:12:15 PM	H2 MFC set to  500.000000
8/17/2010	2:12:15 PM	BCl3 MFC set to  0.000000
8/17/2010	2:12:15 PM	PHl3 MFC set to  0.000000
8/17/2010	2:12:15 PM	SiCl4 MFC set to  0.000000
8/17/2010	2:12:15 PM	Bypass solenoid MFC set to  0.000000
8/17/2010	2:12:15 PM	Tube furnace set to 100
8/17/2010	2:13:34 PM	Helium valve closed
8/17/2010	2:13:34 PM	BCl3 valve closed
8/17/2010	2:13:34 PM	PH3 valve closed
8/17/2010	2:13:34 PM	SiCl4 pre valve closed
8/17/2010	2:13:34 PM	SiCl4 post valve closed
8/17/2010	2:13:34 PM	Main Vac valve closed
8/17/2010	2:13:34 PM	Bypass valve closed
8/17/2010	2:13:34 PM	H2 valve opened
8/17/2010	2:13:34 PM	Bubbler valve opened
8/17/2010	2:13:34 PM	Helium MFC set to  0.000000
8/17/2010	2:13:34 PM	H2 MFC set to  500.000000
8/17/2010	2:13:34 PM	BCl3 MFC set to  0.000000
8/17/2010	2:13:34 PM	PHl3 MFC set to  0.000000
8/17/2010	2:13:34 PM	SiCl4 MFC set to  0.000000
8/17/2010	2:13:34 PM	Bypass solenoid MFC set to  0.000000
8/17/2010	2:13:35 PM	Tube furnace set to 1000
8/17/2010	2:33:34 PM	Helium valve closed
8/17/2010	2:33:34 PM	PH3 valve closed
8/17/2010	2:33:34 PM	Main Vac valve closed
8/17/2010	2:33:34 PM	Bypass valve closed
8/17/2010	2:33:34 PM	H2 valve opened
8/17/2010	2:33:34 PM	BCl3 valve opened
8/17/2010	2:33:34 PM	SiCl4 pre valve opened
8/17/2010	2:33:34 PM	SiCl4 post valve opened
8/17/2010	2:33:34 PM	Bubbler valve opened
8/17/2010	2:33:34 PM	Helium MFC set to  0.000000
8/17/2010	2:33:34 PM	H2 MFC set to  500.000000
8/17/2010	2:33:34 PM	BCl3 MFC set to  29.000000
8/17/2010	2:33:34 PM	PHl3 MFC set to  0.000000
8/17/2010	2:33:34 PM	SiCl4 MFC set to  50.000000
8/17/2010	2:33:34 PM	Bypass solenoid MFC set to  0.000000
8/17/2010	2:33:35 PM	Tube furnace set to 1000
8/17/2010	2:39:35 PM	H2 valve closed
8/17/2010	2:39:35 PM	BCl3 valve closed
8/17/2010	2:39:35 PM	PH3 valve closed
8/17/2010	2:39:35 PM	SiCl4 pre valve closed
8/17/2010	2:39:35 PM	SiCl4 post valve closed
8/17/2010	2:39:35 PM	Main Vac valve closed
8/17/2010	2:39:35 PM	Bypass valve closed
8/17/2010	2:39:35 PM	Helium valve opened
8/17/2010	2:39:35 PM	Bubbler valve opened
8/17/2010	2:39:35 PM	Helium MFC set to  500.000000
8/17/2010	2:39:35 PM	H2 MFC set to  0.000000
8/17/2010	2:39:35 PM	BCl3 MFC set to  0.000000
8/17/2010	2:39:35 PM	PHl3 MFC set to  0.000000
8/17/2010	2:39:35 PM	SiCl4 MFC set to  0.000000
8/17/2010	2:39:35 PM	Bypass solenoid MFC set to  0.000000
8/17/2010	2:39:35 PM	Tube furnace set to 0
8/17/2010	2:59:35 PM	Helium valve closed
8/17/2010	2:59:35 PM	H2 valve closed
8/17/2010	2:59:35 PM	BCl3 valve closed
8/17/2010	2:59:35 PM	PH3 valve closed
8/17/2010	2:59:35 PM	SiCl4 pre valve closed
8/17/2010	2:59:35 PM	SiCl4 post valve closed
8/17/2010	2:59:35 PM	Main Vac valve closed
8/17/2010	2:59:35 PM	Bypass valve closed
8/17/2010	2:59:35 PM	Bubbler valve closed
8/17/2010	2:59:35 PM	Helium MFC set to  0.000000
8/17/2010	2:59:35 PM	H2 MFC set to  0.000000
8/17/2010	2:59:35 PM	BCl3 MFC set to  0.000000
8/17/2010	2:59:35 PM	PHl3 MFC set to  0.000000
8/17/2010	2:59:35 PM	SiCl4 MFC set to  0.000000
8/17/2010	2:59:35 PM	Bypass solenoid MFC set to  0.000000
8/17/2010	2:59:35 PM	Tube furnace set to 0
8/17/2010	2:59:35 PM	Run finished at 2:59 PM
8/17/2010	3:27:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/17/2010	3:27:14 PM	Recipe started at 3:27 PM
8/17/2010	3:27:14 PM	Helium valve closed
8/17/2010	3:27:14 PM	H2 valve closed
8/17/2010	3:27:14 PM	BCl3 valve closed
8/17/2010	3:27:14 PM	PH3 valve closed
8/17/2010	3:27:14 PM	SiCl4 pre valve closed
8/17/2010	3:27:14 PM	SiCl4 post valve closed
8/17/2010	3:27:14 PM	Main Vac valve closed
8/17/2010	3:27:14 PM	Bubbler valve closed
8/17/2010	3:27:14 PM	Bypass valve opened
8/17/2010	3:27:14 PM	Helium MFC set to  0.000000
8/17/2010	3:27:14 PM	H2 MFC set to  0.000000
8/17/2010	3:27:14 PM	BCl3 MFC set to  0.000000
8/17/2010	3:27:14 PM	PHl3 MFC set to  0.000000
8/17/2010	3:27:14 PM	SiCl4 MFC set to  0.000000
8/17/2010	3:27:14 PM	Bypass solenoid MFC set to  0.000000
8/17/2010	3:27:14 PM	Tube furnace set to 0
8/17/2010	3:27:53 PM	Helium valve closed
8/17/2010	3:27:53 PM	H2 valve closed
8/17/2010	3:27:53 PM	BCl3 valve closed
8/17/2010	3:27:53 PM	PH3 valve closed
8/17/2010	3:27:53 PM	SiCl4 pre valve closed
8/17/2010	3:27:53 PM	SiCl4 post valve closed
8/17/2010	3:27:53 PM	Bubbler valve closed
8/17/2010	3:27:53 PM	Main Vac valve opened
8/17/2010	3:27:53 PM	Bypass valve opened
8/17/2010	3:27:53 PM	Helium MFC set to  0.000000
8/17/2010	3:27:53 PM	H2 MFC set to  0.000000
8/17/2010	3:27:53 PM	BCl3 MFC set to  0.000000
8/17/2010	3:27:53 PM	PHl3 MFC set to  0.000000
8/17/2010	3:27:53 PM	SiCl4 MFC set to  0.000000
8/17/2010	3:27:53 PM	Bypass solenoid MFC set to  0.000000
8/17/2010	3:27:53 PM	Tube furnace set to 0
8/17/2010	3:27:53 PM	Run finished at 3:27 PM
8/17/2010	3:27:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/17/2010	4:03:07 PM	Helium valve opened
8/17/2010	4:03:09 PM	Helium MFC set to  100.000000
8/17/2010	4:19:19 PM	Helium valve closed
8/17/2010	5:34:39 PM	Helium valve opened
8/17/2010	5:34:41 PM	Tube furnace set to 100
8/17/2010	5:36:39 PM	Helium valve closed
8/17/2010	5:36:41 PM	Helium MFC set to  0.000000
8/17/2010	5:37:49 PM	Bypass valve closed
8/17/2010	5:37:49 PM	Main Vac valve closed
8/17/2010	5:37:53 PM	Main Vac valve opened
8/17/2010	5:38:03 PM	Bypass valve opened
8/17/2010	5:38:18 PM	Recipe started at 5:38 PM
8/17/2010	5:38:18 PM	Helium valve closed
8/17/2010	5:38:18 PM	BCl3 valve closed
8/17/2010	5:38:18 PM	PH3 valve closed
8/17/2010	5:38:18 PM	SiCl4 pre valve closed
8/17/2010	5:38:18 PM	SiCl4 post valve closed
8/17/2010	5:38:18 PM	Main Vac valve closed
8/17/2010	5:38:18 PM	Bypass valve closed
8/17/2010	5:38:18 PM	Bubbler valve closed
8/17/2010	5:38:18 PM	H2 valve opened
8/17/2010	5:38:18 PM	Helium MFC set to  0.000000
8/17/2010	5:38:18 PM	H2 MFC set to  500.000000
8/17/2010	5:38:18 PM	BCl3 MFC set to  0.000000
8/17/2010	5:38:18 PM	PHl3 MFC set to  0.000000
8/17/2010	5:38:18 PM	SiCl4 MFC set to  0.000000
8/17/2010	5:38:18 PM	Bypass solenoid MFC set to  0.000000
8/17/2010	5:38:18 PM	Tube furnace set to 100
8/17/2010	5:39:37 PM	Helium valve closed
8/17/2010	5:39:37 PM	BCl3 valve closed
8/17/2010	5:39:37 PM	PH3 valve closed
8/17/2010	5:39:37 PM	SiCl4 pre valve closed
8/17/2010	5:39:37 PM	SiCl4 post valve closed
8/17/2010	5:39:37 PM	Main Vac valve closed
8/17/2010	5:39:37 PM	Bypass valve closed
8/17/2010	5:39:37 PM	H2 valve opened
8/17/2010	5:39:37 PM	Bubbler valve opened
8/17/2010	5:39:37 PM	Helium MFC set to  0.000000
8/17/2010	5:39:37 PM	H2 MFC set to  500.000000
8/17/2010	5:39:37 PM	BCl3 MFC set to  0.000000
8/17/2010	5:39:37 PM	PHl3 MFC set to  0.000000
8/17/2010	5:39:37 PM	SiCl4 MFC set to  0.000000
8/17/2010	5:39:37 PM	Bypass solenoid MFC set to  0.000000
8/17/2010	5:39:37 PM	Tube furnace set to 1000
8/17/2010	5:59:37 PM	Helium valve closed
8/17/2010	5:59:37 PM	BCl3 valve closed
8/17/2010	5:59:37 PM	PH3 valve closed
8/17/2010	5:59:37 PM	SiCl4 pre valve closed
8/17/2010	5:59:37 PM	SiCl4 post valve closed
8/17/2010	5:59:37 PM	Main Vac valve closed
8/17/2010	5:59:37 PM	Bypass valve closed
8/17/2010	5:59:37 PM	H2 valve opened
8/17/2010	5:59:37 PM	Bubbler valve opened
8/17/2010	5:59:37 PM	Helium MFC set to  0.000000
8/17/2010	5:59:37 PM	H2 MFC set to  500.000000
8/17/2010	5:59:37 PM	BCl3 MFC set to  0.000000
8/17/2010	5:59:37 PM	PHl3 MFC set to  0.000000
8/17/2010	5:59:37 PM	SiCl4 MFC set to  0.000000
8/17/2010	5:59:37 PM	Bypass solenoid MFC set to  0.000000
8/17/2010	5:59:38 PM	Tube furnace set to 1000
8/17/2010	6:09:38 PM	Helium valve closed
8/17/2010	6:09:38 PM	PH3 valve closed
8/17/2010	6:09:38 PM	Main Vac valve closed
8/17/2010	6:09:38 PM	Bypass valve closed
8/17/2010	6:09:38 PM	H2 valve opened
8/17/2010	6:09:38 PM	BCl3 valve opened
8/17/2010	6:09:38 PM	SiCl4 pre valve opened
8/17/2010	6:09:38 PM	SiCl4 post valve opened
8/17/2010	6:09:38 PM	Bubbler valve opened
8/17/2010	6:09:38 PM	Helium MFC set to  0.000000
8/17/2010	6:09:38 PM	H2 MFC set to  500.000000
8/17/2010	6:09:38 PM	BCl3 MFC set to  29.000000
8/17/2010	6:09:38 PM	PHl3 MFC set to  0.000000
8/17/2010	6:09:38 PM	SiCl4 MFC set to  50.000000
8/17/2010	6:09:38 PM	Bypass solenoid MFC set to  0.000000
8/17/2010	6:09:38 PM	Tube furnace set to 1000
8/17/2010	6:15:38 PM	H2 valve closed
8/17/2010	6:15:38 PM	BCl3 valve closed
8/17/2010	6:15:38 PM	PH3 valve closed
8/17/2010	6:15:38 PM	SiCl4 pre valve closed
8/17/2010	6:15:38 PM	SiCl4 post valve closed
8/17/2010	6:15:38 PM	Main Vac valve closed
8/17/2010	6:15:38 PM	Bypass valve closed
8/17/2010	6:15:38 PM	Helium valve opened
8/17/2010	6:15:38 PM	Bubbler valve opened
8/17/2010	6:15:38 PM	Helium MFC set to  500.000000
8/17/2010	6:15:38 PM	H2 MFC set to  0.000000
8/17/2010	6:15:38 PM	BCl3 MFC set to  0.000000
8/17/2010	6:15:38 PM	PHl3 MFC set to  0.000000
8/17/2010	6:15:38 PM	SiCl4 MFC set to  0.000000
8/17/2010	6:15:38 PM	Bypass solenoid MFC set to  0.000000
8/17/2010	6:15:38 PM	Tube furnace set to 0
8/17/2010	6:35:38 PM	Helium valve closed
8/17/2010	6:35:38 PM	H2 valve closed
8/17/2010	6:35:38 PM	BCl3 valve closed
8/17/2010	6:35:38 PM	PH3 valve closed
8/17/2010	6:35:38 PM	SiCl4 pre valve closed
8/17/2010	6:35:38 PM	SiCl4 post valve closed
8/17/2010	6:35:38 PM	Main Vac valve closed
8/17/2010	6:35:38 PM	Bypass valve closed
8/17/2010	6:35:38 PM	Bubbler valve closed
8/17/2010	6:35:38 PM	Helium MFC set to  0.000000
8/17/2010	6:35:38 PM	H2 MFC set to  0.000000
8/17/2010	6:35:38 PM	BCl3 MFC set to  0.000000
8/17/2010	6:35:38 PM	PHl3 MFC set to  0.000000
8/17/2010	6:35:38 PM	SiCl4 MFC set to  0.000000
8/17/2010	6:35:38 PM	Bypass solenoid MFC set to  0.000000
8/17/2010	6:35:38 PM	Tube furnace set to 0
8/17/2010	6:35:38 PM	Run finished at 6:35 PM
